DocumentCode
1139651
Title
120-GHz long-wavelength low-capacitance photodetector with an air-bridged coplanar metal waveguide
Author
Tan, I-Hsing ; Sun, Chi-Kuang ; Giboney, Kirk S. ; Bowers, John E. ; Hu, Evelyn L. ; Miller, B.I. ; Capik, R.J.
Author_Institution
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
Volume
7
Issue
12
fYear
1995
Firstpage
1477
Lastpage
1479
Abstract
We demonstrate a long-wavelength detector structure using an undercut mesa and an air-bridged coplanar metal waveguide to significantly reduce both the diode RC constant and the parasitic capacitance. Record electrical bandwidths of 120 GHz are demonstrated for long-wavelength photodetectors.
Keywords
capacitance; coplanar waveguides; infrared detectors; optical planar waveguides; optical waveguide components; photodetectors; 120 GHz; IR detectors; air-bridged coplanar metal waveguide; diode RC constant; electrical bandwidths; long-wavelength detector structure; low-capacitance photodetector; parasitic capacitance; Bandwidth; Coplanar waveguides; Detectors; Indium gallium arsenide; Indium phosphide; Optical waveguides; P-i-n diodes; Parasitic capacitance; Photodetectors; Substrates;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.477288
Filename
477288
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