• DocumentCode
    1139651
  • Title

    120-GHz long-wavelength low-capacitance photodetector with an air-bridged coplanar metal waveguide

  • Author

    Tan, I-Hsing ; Sun, Chi-Kuang ; Giboney, Kirk S. ; Bowers, John E. ; Hu, Evelyn L. ; Miller, B.I. ; Capik, R.J.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
  • Volume
    7
  • Issue
    12
  • fYear
    1995
  • Firstpage
    1477
  • Lastpage
    1479
  • Abstract
    We demonstrate a long-wavelength detector structure using an undercut mesa and an air-bridged coplanar metal waveguide to significantly reduce both the diode RC constant and the parasitic capacitance. Record electrical bandwidths of 120 GHz are demonstrated for long-wavelength photodetectors.
  • Keywords
    capacitance; coplanar waveguides; infrared detectors; optical planar waveguides; optical waveguide components; photodetectors; 120 GHz; IR detectors; air-bridged coplanar metal waveguide; diode RC constant; electrical bandwidths; long-wavelength detector structure; low-capacitance photodetector; parasitic capacitance; Bandwidth; Coplanar waveguides; Detectors; Indium gallium arsenide; Indium phosphide; Optical waveguides; P-i-n diodes; Parasitic capacitance; Photodetectors; Substrates;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/68.477288
  • Filename
    477288