Performance Fluctuation of FinFETs With Schottky Barrier Source/Drain

A considerable performance fluctuation of FinFETs featuring PtSi-based Schottky barrier source/drain is found. The Fin-channels measure 27-nm tall and 35-nm wide. Investigation of similarly processed transistors of broad gate-widths reveals a large variation in the position of the PtSi/Si interface with reference to the gate edge along the gate width. This variation suggests an uneven underlap between the PtSi and the gate from device to device for the FinFETs, since essentially only one silicide grain would be in contact with each Fin-channel at the PtSi/Si interface. The size of the underlap is expected to sensitively affect the performance of the FinFETs.