DocumentCode :
1140361
Title :
Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling
Author :
Chen, G. ; Li, M.-F. ; Ang, C.H. ; Zheng, J.Z. ; Kwong, D.L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Volume :
23
Issue :
12
fYear :
2002
Firstpage :
734
Lastpage :
736
Abstract :
For the first time, a dynamic negative bias temperature instability (DNBTI) effect in p-MOSFETs with ultrathin gate oxide (1.3 nm) has been studied. The interface traps generated under NBTI stressing corresponding to p-MOSFET operating condition of the "high" output state in a CMOS inverter, are subsequently passivated when the gate to drain voltage switches to positive corresponding to the p-MOSFET operating condition of the "low" output state in the CMOS inverter. Consequently, this DNBTI effect significantly prolongs the lifetime of p-MOSFETs operating in a digital circuit, and the conventional static NBTI (SNBTI) measurement underestimates the p-MOSFET lifetime. A physical model is presented to explain the DNBTI. This finding has significant impact on future scaling of CMOS devices.
Keywords :
CMOS digital integrated circuits; MOSFET; interface states; passivation; semiconductor device models; semiconductor device reliability; 1.3 nm; CMOS device scaling; CMOS inverter; MOSFET scaling; digital circuit operation; dynamic negative bias temperature instability effect; gate to drain voltage; high output state; interface traps; low output state; p-MOSFETs; physical model; reliability issues; static NBTI measurement; ultrathin gate oxide; Digital circuits; Inverters; MOSFET circuits; Negative bias temperature instability; Niobium compounds; Plasma measurements; Stress; Switches; Titanium compounds; Voltage;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2002.805750
Filename :
1177969
Link To Document :
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