DocumentCode
1140361
Title
Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling
Author
Chen, G. ; Li, M.-F. ; Ang, C.H. ; Zheng, J.Z. ; Kwong, D.L.
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Volume
23
Issue
12
fYear
2002
Firstpage
734
Lastpage
736
Abstract
For the first time, a dynamic negative bias temperature instability (DNBTI) effect in p-MOSFETs with ultrathin gate oxide (1.3 nm) has been studied. The interface traps generated under NBTI stressing corresponding to p-MOSFET operating condition of the "high" output state in a CMOS inverter, are subsequently passivated when the gate to drain voltage switches to positive corresponding to the p-MOSFET operating condition of the "low" output state in the CMOS inverter. Consequently, this DNBTI effect significantly prolongs the lifetime of p-MOSFETs operating in a digital circuit, and the conventional static NBTI (SNBTI) measurement underestimates the p-MOSFET lifetime. A physical model is presented to explain the DNBTI. This finding has significant impact on future scaling of CMOS devices.
Keywords
CMOS digital integrated circuits; MOSFET; interface states; passivation; semiconductor device models; semiconductor device reliability; 1.3 nm; CMOS device scaling; CMOS inverter; MOSFET scaling; digital circuit operation; dynamic negative bias temperature instability effect; gate to drain voltage; high output state; interface traps; low output state; p-MOSFETs; physical model; reliability issues; static NBTI measurement; ultrathin gate oxide; Digital circuits; Inverters; MOSFET circuits; Negative bias temperature instability; Niobium compounds; Plasma measurements; Stress; Switches; Titanium compounds; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2002.805750
Filename
1177969
Link To Document