• DocumentCode
    1140361
  • Title

    Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling

  • Author

    Chen, G. ; Li, M.-F. ; Ang, C.H. ; Zheng, J.Z. ; Kwong, D.L.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
  • Volume
    23
  • Issue
    12
  • fYear
    2002
  • Firstpage
    734
  • Lastpage
    736
  • Abstract
    For the first time, a dynamic negative bias temperature instability (DNBTI) effect in p-MOSFETs with ultrathin gate oxide (1.3 nm) has been studied. The interface traps generated under NBTI stressing corresponding to p-MOSFET operating condition of the "high" output state in a CMOS inverter, are subsequently passivated when the gate to drain voltage switches to positive corresponding to the p-MOSFET operating condition of the "low" output state in the CMOS inverter. Consequently, this DNBTI effect significantly prolongs the lifetime of p-MOSFETs operating in a digital circuit, and the conventional static NBTI (SNBTI) measurement underestimates the p-MOSFET lifetime. A physical model is presented to explain the DNBTI. This finding has significant impact on future scaling of CMOS devices.
  • Keywords
    CMOS digital integrated circuits; MOSFET; interface states; passivation; semiconductor device models; semiconductor device reliability; 1.3 nm; CMOS device scaling; CMOS inverter; MOSFET scaling; digital circuit operation; dynamic negative bias temperature instability effect; gate to drain voltage; high output state; interface traps; low output state; p-MOSFETs; physical model; reliability issues; static NBTI measurement; ultrathin gate oxide; Digital circuits; Inverters; MOSFET circuits; Negative bias temperature instability; Niobium compounds; Plasma measurements; Stress; Switches; Titanium compounds; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2002.805750
  • Filename
    1177969