DocumentCode :
1140640
Title :
Rapid and Minimally Invasive Quantum Cascade Wafer Testing
Author :
Bentil, Ekua N. ; Toor, Fatima ; Hoffman, Anthony J. ; Escarra, Matthew D. ; Gmachl, Claire F.
Author_Institution :
Dept. of Electr. Eng. & the Mid-Infrared Technol. for Health & the Environ. (MIRTHE) Centre, Princeton Univ., Princeton, NJ
Volume :
21
Issue :
8
fYear :
2009
fDate :
4/15/2009 12:00:00 AM
Firstpage :
531
Lastpage :
533
Abstract :
In this work, we demonstrate a rapid and minimally invasive technique for wafer quality testing, which requires using a single etch and metallization step to fabricate a single mesa. The mesa´s electrical and optical properties are characterized and compared with those of a quantum cascade (QC) laser made from the same wafer, to test the validation of our method. This technique is ideal for determining key QC laser parameters and also the level of agreement between a design and actual laser performance without requiring laser processing which can be highly invasive, labor intensive, and time consuming. Measurements between these mesas and actual reference lasers made from the same wafer material differed by less than ~10% in parameters such as emission wavelength, full-width at half-maximum, turn-on voltage, and maximum operating current density, thus proving the adequacy of our technique.
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; indium compounds; laser variables measurement; metallisation; optical fabrication; optical testing; quantum cascade lasers; semiconductor device testing; InGaAs-AlInAs-InP; QC laser fabrication; laser measurement; mesa electrical properties; mesa optical properties; metallization step; minimally invasive testing; quantum cascade laser performance; quantum cascade wafer quality testing; single etch step; Intersubband; midinfrared; quantum cascade (QC) laser; wafer quality;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2009.2014392
Filename :
4773206
Link To Document :
بازگشت