• DocumentCode
    1141467
  • Title

    Development of a microprocessor interface to a scanning electron microscope

  • Author

    Raja, N.K.L. ; Karkare, Vishahka G. ; David, Sunil K.

  • Author_Institution
    Central Electron. Eng. Res. Inst., Pilani Rajasthan, India
  • Volume
    38
  • Issue
    4
  • fYear
    1989
  • fDate
    8/1/1989 12:00:00 AM
  • Firstpage
    907
  • Lastpage
    912
  • Abstract
    The development and applications of a microprocessor interface to a scanning electron microscope (SEM) for SEM image acquisition and electron-beam writing is described. The design considerations and system-related constraints along with necessary modifications to the SEM are presented. Hardware and software optimization is attempted, and the approach is discussed. Some results of applications are presented
  • Keywords
    computer interfaces; computerised instrumentation; data acquisition; microcomputer applications; physics computing; scanning electron microscopy; SEM image acquisition; electron-beam writing; microprocessor interface; optimization; scanning electron microscope; Application software; Cathode ray tubes; Displays; Electron beams; Intensity modulation; Microprocessors; Optical microscopy; Optical modulation; Scanning electron microscopy; Voltage;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.31012
  • Filename
    31012
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1141467