Micro-automating semiconductor fabrication

Author

Busch-Vishniac, Ilene J.

Author_Institution

Dept. of Mech. Eng., Texas Univ., Austin, TX, USA

Volume

7

Issue

4

fYear

1991

fDate

7/1/1991 12:00:00 AM

Firstpage

32

Lastpage

37

Abstract

Progress in automating very-small-scale mechanical processes is reviewed. The special requirements of microautomation are identified, and three applications are examined. They are positioning, electrical probing, and mechanical probing. The architecture and design of a microautomation system are described. Microsensors and microactuators are discussed. The use of magnetics technology for driving the microautomation system is reported, and a precision workspace for demonstrating a microautomation system is described. Also described are a coarse/fine positioner and a linear transport path capable of moving the fine manipulator from one precision-demanding area to another.<>

Keywords

electric actuators; electric sensing devices; integrated circuit manufacture; position control; semiconductor device manufacture; coarse/fine positioner; electrical probing; linear transport path; magnetics technology; manipulator; mechanical probing; microactuators; microautomation system; microsensors; positioning; semiconductor fabrication; Automatic control; Biomedical optical imaging; Fabrication; High speed optical techniques; Manufacturing automation; Microelectronics; Optical sensors; Particle beam optics; Payloads; Robots;

fLanguage

English

Journal_Title

Circuits and Devices Magazine, IEEE

Publisher

ieee

ISSN

8755-3996

Type

jour

DOI

10.1109/101.134569

Filename

134569