مرکز منطقه ای اطلاع رساني علوم و فناوري - 2nd Special Issue on Advanced Process Control

DocumentCode :

1142541

Title :

2nd Special Issue on Advanced Process Control

Volume :

Issue :

fYear :

2009

Firstpage :

212

Lastpage :

212

Abstract :

Prospective authors are requested to submit new, unpublished manuscripts for inclusion in the upcoming event described in this call for papers.

Keywords :

Process control;

fLanguage :

English

Journal_Title :

Semiconductor Manufacturing, IEEE Transactions on

Publisher :

ieee

ISSN :

0894-6507

Type :

jour

DOI :

10.1109/TSM.2009.2014422

Filename :

4773479

Link To Document :