Multisensor microsystem for pulmonary function diagnostics

Author

Van Putten, Anton F P ; Van Putten, Michael J A M ; Van Putten, Maurice H P M ; Van Putten, Pascal F A M

Author_Institution

AnMar Res. Lab., Eindhoven, Netherlands

Volume

2

Issue

6

fYear

2002

fDate

12/1/2002 12:00:00 AM

Firstpage

636

Lastpage

643

Abstract

A multisensor microsystem for general lung diagnostics is presented. The microsystem measures peak expiratory flow, temperature, pressure, and relative humidity. Solid-state technology provides an integrated multisensor solution applying silicon MEMS technology. Prototypes implemented on two silicon chips show promising results in their application to flow measurement in a healthy volunteer. Calibration issues are briefly discussed.

Keywords

biomedical measurement; elemental semiconductors; flow measurement; humidity measurement; humidity sensors; lung; microsensors; patient diagnosis; pneumodynamics; pressure measurement; pressure sensors; silicon; temperature measurement; temperature sensors; Si; Si MEMS technology; Si chips; calibration issues; expiratory flow; flow measurement; general lung diagnostics; healthy volunteer; integrated multisensor solution; multisensor microsystem; pulmonary function diagnostics; relative humidity; solid-state technology; Fluid flow measurement; Humidity measurement; Lungs; Micromechanical devices; Pressure measurement; Prototypes; Semiconductor device measurement; Silicon; Solid state circuits; Temperature;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2002.807492

Filename

1178177