Title :
Technique for the Rapid Characterization of Parametric Distributions
Author :
Hayes, Jerry D. ; Agarwal, Kanak ; Nassif, Sani R.
Author_Institution :
IBM Austin Res. Labs., Austin, TX, USA
Abstract :
We present a technique for fast characterization of the statistical mean and sigma of parametric variations. The technique uses a scan chain to sequentially cycle through a device array, creating a periodic waveform that can be directly measured using a multimeter. The dc and root-mean square values of the waveform directly give the mean and sigma of the parameter distribution. We show the technique is sufficiently general and can be applied to a wide range of characterization strategies. A VTH characterization array was implemented in a 65-nm bulk CMOS process where we compare traditional individual device measurements for calculating statistics with the direct mean and sigma measurement technique using the multimeter.
Keywords :
CMOS integrated circuits; statistical distributions; CMOS process; mean and sigma measurement; parametric distributions; periodic waveform; scan chain; CMOS process; Circuit optimization; Circuit testing; Measurement techniques; Monitoring; Ring oscillators; Statistical analysis; Statistical distributions; Threshold voltage; Time measurement; Process monitoring; random dopant fluctuation; test structure; threshold voltage;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2008.2010732