Title :
Special Section on the 2008 International Conference on Microelectronic Test Structures
Author :
Schmitz, Jurriaan
Abstract :
The 13 papers in this special section were originally presented at the 2008 International Conference on Microelectronic Test Structures (ICMTS), held in Edinburgh, UK.
Keywords :
Circuit testing; Europe; Integrated circuit interconnections; Integrated circuit measurements; Integrated circuit testing; Microelectronics; Physics; Process control; Solid state circuits; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2008.2010725
