Title :
Transparent ITO-Mn:ITO Thin-Film Thermocouples
Author :
Kumar, S. R Sarath ; Kasiviswanathan, S.
Author_Institution :
Dept. of Phys., Indian Inst. of Technol. Madras, Chennai, India
fDate :
7/1/2009 12:00:00 AM
Abstract :
Transparent thin-film thermocouples have been fabricated with indium tin oxide (ITO) and manganese doped indium tin oxide (Mn:ITO) as the positive and negative legs, respectively. Optical transparency of the thermocouples was above 85% in the visible region of the spectrum. Presence of Mn has been found to enhance the thermoelectric response, without significantly increasing the resistivity. Seebeck voltages of ~ 20 mV and ~ 31 mV have been obtained at 625 K, respectively, for the thermocouples with Mn:ITO legs having 1.6 at.% and 4.3 at.% Mn. The response has been found to be reproducible with an error of plusmn2%.
Keywords :
Seebeck effect; indium compounds; manganese; sputter deposition; temperature sensors; thermocouples; thin film devices; transparency; DC reactive sputtering; ITO:Mn-ITO; Seebeck voltage; indium tin oxide; manganese doped indium tin oxide; optical transparency; temperature 625 K; temperature sensor; thermoelectric response; transparent thin-film thermocouple fabrication; visible spectrum; Conductivity; Indium tin oxide; Leg; Manganese; Optical films; Optical sensors; Temperature sensors; Thermoelectricity; Transistors; Voltage; Thermocouple; thin-film devices; transparent conducting oxides;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2009.2022556
