VCSELs with a self-aligned contact and copper-plated heatsink

Author

Al-Omari, Ahmad N. ; Lear, Kevin L.

Author_Institution

Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO, USA

Volume

17

Issue

9

fYear

2005

Firstpage

1767

Lastpage

1769

Abstract

Top-emitting, 850-nm vertical-cavity surface-emitting lasers with a self-aligned top contact and evaporated gold or plated copper heatsink were fabricated and characterized. Thermal resistance was reduced by 44%, and output power and bandwidth were increased by 38% and 12%, respectively. The fabricated devices exhibit a 3-dB modulation frequency bandwidth up to 16.3 GHz at 10 kA/cm².

Keywords

copper; frequency modulation; gold; heat sinks; optical modulation; semiconductor lasers; surface emitting lasers; thermal resistance; 850 nm; Au; Cu; VCSEL; copper-plated heatsink; gold-plated heatsink; modulation frequency bandwidth; self-aligned contact; thermal resistance; vertical-cavity surface-emitting lasers; Apertures; Bandwidth; Contacts; Etching; Polyimides; Semiconductor lasers; Surface emitting lasers; Thermal conductivity; Thermal management; Vertical cavity surface emitting lasers; Au; Cu; modulation bandwidth; parasitic capacitance; semiconductor lasers; thermal management; three-decibel (3-dB) frequency; vertical-cavity surface-emitting lasers (VCSELs);

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2005.851938

Filename

1498852