DocumentCode :
1146569
Title :
Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator
Author :
Cheung, Patrick ; Horowitz, Roberto ; Rowe, R.T.
Author_Institution :
Comput. Mech. Lab., California Univ., Berkeley, CA, USA
Volume :
32
Issue :
1
fYear :
1996
fDate :
1/1/1996 12:00:00 AM
Firstpage :
122
Lastpage :
128
Abstract :
This paper describes the design, fabrication, position sensing, and control of an electrostatically-driven microactuator. The polysilicon microactuator, together with an on-chip electronic buffer, were fabricated by the Modular Integration of CMOS and microStructure (MICS) technology. The microactuator has a linear dimension of 310 μm×340 μm×1.7 μm and a “long throw” range of motion of ±4 μm. The driving comb fingers of the microactuator can generate up to 0.3 μN of electrostatic force, which is able to pull the suspended microactuator across the substrate at an acceleration of over 270 G´s. The lateral position of the microactuator, relative to the substrate, is capacitively sensed by a Kalman filtering scheme, which achieves a position estimation error covariance below 0.01 μm RMS. A state-variable feedback loop operates at a closed loop bandwidth of over 11 kHz. Experimental results are given
Keywords :
Kalman filters; electrostatic devices; elemental semiconductors; microactuators; microsensors; position measurement; silicon; CMOS technology; Kalman filtering; Modular Integration; Si; capacitive sensing; closed loop bandwidth; comb fingers; control; design; electrostatically-driven polysilicon microactuator; fabrication; long throw range of motion; microStructure technology; on-chip electronic buffer; position estimation error covariance; position sensing; state-variable feedback loop; Acceleration; CMOS technology; Electrostatics; Fabrication; Filtering; Fingers; Kalman filters; Microactuators; Microstructure; Microwave integrated circuits;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.477561
Filename :
477561
Link To Document :
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