• DocumentCode
    1146695
  • Title

    Design considerations for a Gaudi test structure which can be used to determine the optimum focus

  • Author

    Fallon, Martin ; Walton, Anthony J. ; Stevenson, J.T.M. ; Ross, Alan W S

  • Author_Institution
    Dept. of Electr. Eng., Edinburgh Univ., UK
  • Volume
    7
  • Issue
    3
  • fYear
    1994
  • fDate
    8/1/1994 12:00:00 AM
  • Firstpage
    272
  • Lastpage
    278
  • Abstract
    A test structure is described which can be used to optimize the focus of wafer steppers. Simulation is used to examine the effect that some of the design parameters have on the sensitivity of the structure. Finally some practical measurements are presented
  • Keywords
    focusing; semiconductor technology; Gaudi test structure; design parameters; optimum focus; sensitivity; wafer steppers; Bars; Electric resistance; Electric variables measurement; Focusing; Helium; Image resolution; Instruments; Optical sensors; Stimulated emission; Testing;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/66.311329
  • Filename
    311329
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1146695