Title :
Design considerations for a Gaudi test structure which can be used to determine the optimum focus
Author :
Fallon, Martin ; Walton, Anthony J. ; Stevenson, J.T.M. ; Ross, Alan W S
Author_Institution :
Dept. of Electr. Eng., Edinburgh Univ., UK
fDate :
8/1/1994 12:00:00 AM
Abstract :
A test structure is described which can be used to optimize the focus of wafer steppers. Simulation is used to examine the effect that some of the design parameters have on the sensitivity of the structure. Finally some practical measurements are presented
Keywords :
focusing; semiconductor technology; Gaudi test structure; design parameters; optimum focus; sensitivity; wafer steppers; Bars; Electric resistance; Electric variables measurement; Focusing; Helium; Image resolution; Instruments; Optical sensors; Stimulated emission; Testing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
