Title :
Synthesis and characterization of cupric oxide thin films by sol-gel method
Author :
Nurfazliana, M.F. ; Kamaraddin, S.A. ; Nafarizal, N. ; Saim, H. ; Sahdan, Mohd Zainizan
Author_Institution :
Microelectron. & Nanotechnol. - Shamsuddin Res. Center, Univ. Tun Hussein Onn Malaysia, Parit Raja, Malaysia
Abstract :
Cupric oxide (CuO) thin films were successfully grown on glass substrates by low cost sol-gel method. In this work, non-contact atomic force microscope (AFM) and current mode atomic force microscope (C-AFM) was used to physically characterize the CuO thin films. Two different samples using molar concentration of 1 mM and 5 mM were used. The surface morphology of CuO thin films were observed by a field emission scanning electron microscopy (FESEM). Meanwhile, the structural property of the films was measured by an X-ray diffractometer (XRD). From the results, XRD showed the formation of single-phase CuO films with monoclinic structures while FESEM morphological image found that the films with different molar concentration produced different shapes of morphological surface structure. In addition, it was noticed that when the molar concentration increased, the surface of the films become smoother and denser. The microstructures characterization revealed that the films were substantially affected by precursor concentration.
Keywords :
X-ray diffraction; atomic force microscopy; copper compounds; field emission electron microscopy; scanning electron microscopy; semiconductor growth; semiconductor materials; semiconductor thin films; sol-gel processing; surface morphology; ultraviolet spectra; visible spectra; AFM; C-AFM; CuO; FESEM; X-ray diffraction; XRD; current mode atomic force microscopy; field emission scanning electron microscopy; glass substrates; microstructure; molar concentration; monoclinic structures; noncontact atomic force microscopy; optical absorption; sol-gel method; surface morphology; thin films; Atomic force microscopy; Films; Glass; Substrates; Surface morphology; cupric oxide; microstructures; precursor concentration; sol-gel;
Conference_Titel :
Semiconductor Electronics (ICSE), 2014 IEEE International Conference on
Conference_Location :
Kuala Lumpur
DOI :
10.1109/SMELEC.2014.6920805