• DocumentCode
    1147911
  • Title

    Dynamic admittance matrix of piezoelectric cantilever bimorphs

  • Author

    Smits, Jan G. ; Ballato, Arthur

  • Author_Institution
    Dept. of Electr., Comput. & Syst. Eng., Boston, MA, USA
  • Volume
    3
  • Issue
    3
  • fYear
    1994
  • fDate
    9/1/1994 12:00:00 AM
  • Firstpage
    105
  • Lastpage
    112
  • Abstract
    The matrix that relates the harmonically varying driving parameters: a moment M at the tip, a force F at the tip, a uniformly applied body force p and voltage V to their response parameters: the tip rotation α, the tip deflection δ, the volumetric displacement V and the electrode charge Q, have been determined. The electrical element of this matrix is the (4,4) element, which is the electrical capacitance, hence we call this the dynamic admittance matrix. It is a four by four symmetric matrix having a purely electrical part, a purely elastic part and a mixed (piezoelectric) part. A common factor in nearly all elements describes the resonance frequencies that are to be expected
  • Keywords
    electric admittance; matrix algebra; micromechanical devices; piezoelectric transducers; dynamic admittance matrix; electrical capacitance; electrode charge; harmonically varying driving parameters; piezoelectric cantilever bimorphs; resonance frequencies; tip deflection; tip rotation; uniformly applied body force; volumetric displacement; Admittance; Capacitance; Electrodes; Equations; Optical filters; Piezoelectric polarization; Resonance; Strips; Symmetric matrices; Voltage;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/84.311560
  • Filename
    311560