DocumentCode
1147911
Title
Dynamic admittance matrix of piezoelectric cantilever bimorphs
Author
Smits, Jan G. ; Ballato, Arthur
Author_Institution
Dept. of Electr., Comput. & Syst. Eng., Boston, MA, USA
Volume
3
Issue
3
fYear
1994
fDate
9/1/1994 12:00:00 AM
Firstpage
105
Lastpage
112
Abstract
The matrix that relates the harmonically varying driving parameters: a moment M at the tip, a force F at the tip, a uniformly applied body force p and voltage V to their response parameters: the tip rotation α, the tip deflection δ, the volumetric displacement V and the electrode charge Q, have been determined. The electrical element of this matrix is the (4,4) element, which is the electrical capacitance, hence we call this the dynamic admittance matrix. It is a four by four symmetric matrix having a purely electrical part, a purely elastic part and a mixed (piezoelectric) part. A common factor in nearly all elements describes the resonance frequencies that are to be expected
Keywords
electric admittance; matrix algebra; micromechanical devices; piezoelectric transducers; dynamic admittance matrix; electrical capacitance; electrode charge; harmonically varying driving parameters; piezoelectric cantilever bimorphs; resonance frequencies; tip deflection; tip rotation; uniformly applied body force; volumetric displacement; Admittance; Capacitance; Electrodes; Equations; Optical filters; Piezoelectric polarization; Resonance; Strips; Symmetric matrices; Voltage;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.311560
Filename
311560
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