Title :
Study of interdigitated electrode sensor for lab-on-chip applications
Author :
Vakilian, Mehdi ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microeng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
Abstract :
In this paper, interdigitated electrodes (IDEs) are studied. IDEs are one of the most popular transducers, widely employed in various technological and analytical applications, especially in the field of biological and chemical sensors due to their low cost, ease of fabrication process and excellent sensitivity. The increasing demand for lab-on-chip (LoC) devices and for designing miniaturized sensors, it becomes essential to utilize of such transducers. In the current study, MEMS module of Comsol multiphysics software is used for the simulation of IDE sensor. The dependence of the IDE capacitance on the geometric parameters including IDE finger spacing, thickness, width, sensor spatial wavelength and sensitive layer thickness are discussed.
Keywords :
capacitance; chemical sensors; finite element analysis; interdigital transducers; lab-on-a-chip; microfabrication; microsensors; Comsol multiphysics software; IDE; IDE capacitance; IDE finger spacing; IDE sensor simulation; LoC device; MEMS module; biological sensors; chemical sensors; fabrication process; geometric parameters; interdigitated electrode sensor; lab-on-chip applications; miniaturized sensor design; sensitive layer thickness; sensor spatial wavelength; transducer; Capacitance; Capacitors; Electrodes; Microwave filters; Permittivity; Thumb; capacitance; interdigitated electrode; lab-on-chip; sensor;
Conference_Titel :
Semiconductor Electronics (ICSE), 2014 IEEE International Conference on
Conference_Location :
Kuala Lumpur
DOI :
10.1109/SMELEC.2014.6920831
