Title :
Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator
Author :
Pawinanto, Roer Eka ; Yunas, Jumril ; Said, Muzalifah Mohd ; Noor, Mimiwaty Mohd ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microeng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
Abstract :
This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.
Keywords :
coils; magnetic actuators; microactuators; microfabrication; printed circuit design; COMSOL Multiphysics 4.2; PCB based planar microcoil design; PCB based planar microcoil fabrication; magnetic MEMS actuator; magnetic flux density; optimum coil geometry; printed-circuit board; size 100 mum; size 150 mum; size 50 mum; Actuators; Coils; Electrical resistance measurement; Fabrication; Magnetic flux density; Resistance; MEMS; Planar micro-coil; magnetic actuator;
Conference_Titel :
Semiconductor Electronics (ICSE), 2014 IEEE International Conference on
Conference_Location :
Kuala Lumpur
DOI :
10.1109/SMELEC.2014.6920904
