Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator

Author

Pawinanto, Roer Eka ; Yunas, Jumril ; Said, Muzalifah Mohd ; Noor, Mimiwaty Mohd ; Majlis, Burhanuddin Yeop

Author_Institution

Inst. of Microeng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia

fYear

2014

fDate

27-29 Aug. 2014

Firstpage

487

Lastpage

490

Abstract

This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.

Keywords

coils; magnetic actuators; microactuators; microfabrication; printed circuit design; COMSOL Multiphysics 4.2; PCB based planar microcoil design; PCB based planar microcoil fabrication; magnetic MEMS actuator; magnetic flux density; optimum coil geometry; printed-circuit board; size 100 mum; size 150 mum; size 50 mum; Actuators; Coils; Electrical resistance measurement; Fabrication; Magnetic flux density; Resistance; MEMS; Planar micro-coil; magnetic actuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics (ICSE), 2014 IEEE International Conference on

Conference_Location

Kuala Lumpur

Type

conf

DOI

10.1109/SMELEC.2014.6920904

Filename

6920904