مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

1152324

Title :

A silicon wafer scanner

Author :

Munro, Deborah

Author_Institution :

Bell Telephone Laboratories, Inc., Allentown, Pa., USA

Volume :

Issue :

fYear :

1973

fDate :

6/1/1973 12:00:00 AM

Firstpage :

674

Lastpage :

674

Keywords :

Inspection; Instruments; Laboratories; Laser beams; Lenses; Light scattering; Mirrors; Optical films; Silicon; Telephony;

fLanguage :

English

Journal_Title :

Quantum Electronics, IEEE Journal of

Publisher :

ieee

ISSN :

0018-9197

Type :

jour

DOI :

10.1109/JQE.1973.1077707

Filename :

1077707

Link To Document :