Title :
Multiport investigation of the coupling of high-impedance probes
Author :
Kabos, P. ; Arz, U. ; Williams, D.F.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Abstract :
We used an on-wafer measurement technique that combines two- and three-port frequency-domain mismatch corrections in order to characterize the influence of a high-impedance probe on a device under test. The procedure quantifies the probe´s load of the circuit, and the coupling between the probe and the device.
Keywords :
electric impedance; electromagnetic coupling; frequency-domain analysis; microwave measurement; multiport networks; probes; test equipment; high-impedance probes; multiport investigation; on-wafer measurement technique; three-port frequency-domain mismatch corrections; three-port measurements; two-port frequency-domain mismatch corrections; Calibration; Circuit testing; Coupling circuits; Hip; Integrated circuit measurements; Measurement techniques; Metrology; Microstrip; Probes; Solids; 65; HIPs; High-impedance probes; invasiveness; three-port measurements;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2004.837071
