Title :
Corrosion resistance of Al-Pd-Si conductor
Author :
Koubuchi, Yasushi ; Onuki, Jin
Author_Institution :
Hitachi Res. Ltd., Ibaraki, Japan
fDate :
5/1/1990 12:00:00 AM
Abstract :
An Al-Pd-Si alloy conductor which has higher corrosion resistance than an Al-Si conductor after resin molding is discussed. A palladium oxide-rich (PdO-rich) area is formed by annealing in the surface oxide film on the Al-Pd-Si alloy conductors. It is responsible for the increased corrosion resistance of Al-Pd-Si with over 0.3 wt.% Pd
Keywords :
aluminium alloys; corrosion; metallisation; palladium alloys; silicon alloys; Al-Pd-Si alloy conductor; AlPdSi; PdO rich area; annealing; corrosion resistance; resin molding; surface oxide film; Annealing; Conductive films; Conductors; Corrosion; Electrodes; Packaging; Passivation; Resins; Testing; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
