DocumentCode
1155748
Title
Phase space approach to charged beam analysis
Author
Polak, S. ; Repetto, M. ; Sabbi, G.L.
Author_Institution
Philips Med. Syst., Best, Netherlands
Volume
30
Issue
5
fYear
1994
fDate
9/1/1994 12:00:00 AM
Firstpage
2928
Lastpage
2931
Abstract
In the design of devices using charged particle beams, often the effect of the charge on the electric field has to be taken into account. The distribution of the space charge in the beam can influence the electric field created by the electron optics significantly. The interaction between electrodes and space charge generated electric fields is described by the Poisson equation, the space charge is governed by the equation of motion. In this paper an interpolation scheme in phase space is presented speeding up the usual successive substitution algorithm considerably. The problem of finding the configuration space distribution from the phase space data is automatically solved, without integrating explicitly over the velocity space. The results obtained in several computational examples are discussed
Keywords
electric fields; electrodes; electron beams; electron optics; space charge; Poisson equation; charged beam analysis; charged particle beams; computational examples; configuration space distribution; electric field; electrodes; electron optics; equation of motion; interpolation scheme; phase space; phase space approach; phase space data; space charge; space charge generated electric fields; successive substitution algorithm; velocity space; Costs; Electrodes; Electron optics; Interpolation; Microscopy; Optical coupling; Particle beams; Poisson equations; Space charge; Testing;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.312550
Filename
312550
Link To Document