Title :
A micromachined impact microactuator driven by electrostatic force
Author :
Mita, Makoto ; Arai, Makoto ; Tensaka, Shouichi ; Kobayashi, Dai ; Fujita, Hiroyuki
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Japan
fDate :
2/1/2003 12:00:00 AM
Abstract :
This paper presents a novel micromachined actuator which is developed to produce precise and unlimited displacement. The actuator is driven by impact force between a silicon micro-mass and a stopper. The suspended silicon micro-mass is encapsulated between two glass plates and driven by electrostatic force. When the mass hits the stopper which is fixed on glass plates, impact force is generated to drive the whole actuator in a nano size step (∼10 nm). The overall dimension of the device is 3 mm ×3 mm. The driving voltage is 100 V and average speed is 2.7 μm/s. The total thickness is 600 μm.
Keywords :
electrostatic actuators; elemental semiconductors; micromachining; silicon; sputter etching; 100 V; 2.7 micron/s; 3 mm; 600 micron; Si; average speed; displacement; driving voltage; electrostatic force; glass plates; impact force; micromachined impact microactuator; nano size step; suspended silicon micro-mass; Acceleration; Displacement control; Electrodes; Electrostatic actuators; Friction; Glass; Microactuators; Silicon; Suspensions; Voltage;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2002.802906
