Title :
Precision measurement of long, small-diameter holes using laser radiation
Author_Institution :
N. American Rockwell Corp., Canoga Park, CA, USA
fDate :
6/1/1969 12:00:00 AM
Keywords :
Diffraction; Distortion measurement; Gas lasers; Jitter; Laboratories; Laser beams; Light scattering; Microscopy; Switches; Voltage;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1969.1082037
