Title :
A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems
Author :
Roberts, David C. ; Li, Hanqing ; Steyn, J. Lodewyk ; Yaglioglu, Onnik ; Spearing, S. Mark ; Schmidt, Martin A. ; Hagood, Nesbitt W.
Author_Institution :
Continuum Photonics Inc., Billerica, MA, USA
fDate :
2/1/2003 12:00:00 AM
Abstract :
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40×-50×) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (≥1 kHz), high pressure(≥300 kPa), and large stroke (20-30 μm) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.
Keywords :
hydraulic systems; micromachining; microvalves; piezoelectric actuators; 20 to 30 micron; bulk piezoelectric material elements; differential pressure; high-force actuation; hydraulic amplification mechanism; hydraulic micropumping systems; micromachined annular tethered-piston structure; piezoelectric microvalve; Biomembranes; Fabrication; Fluid flow; Frequency; Micropumps; Microvalves; Piezoelectric materials; Pistons; Valves; Wafer bonding;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2002.807471
