DocumentCode
1157671
Title
Characteristics of small-signal capacitances of silicon-on-sapphire MOSFETs
Author
Kong, F.C.J. ; Yeow, Y.T. ; Domyo, H.
Author_Institution
Sch. of Inf. Technol. & Electr. Eng., Queensland Univ., St. Lucia, Qld., Australia
Volume
39
Issue
4
fYear
2003
fDate
2/20/2003 12:00:00 AM
Firstpage
407
Lastpage
408
Abstract
The measured inter-electrode capacitances of silicon-on-sapphire (SOS) MOSFETs are presented and compared with simulation results. It is shown that the variations of capacitances with DC bias differ from those of bulk MOSFETs due to change in body potential variation of the SOS device resulting from electron-hole pair generation through impact ionisation.
Keywords
MOSFET; capacitance; impact ionisation; semiconductor device measurement; silicon-on-insulator; surface potential; DC bias; SOS MOSFETs; Si-Al2O3; back surface inversion; back surface potential; body potential variation; capacitance variations; electron-hole pair generation; impact ionisation; inter-electrode capacitance; simulation results; small-signal capacitance;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20030226
Filename
1184097
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