DocumentCode :
1158367
Title :
A combinatorial approach for field-effect gas sensor research and development
Author :
Klingvall, Roger ; Lundström, Ingemar ; Löfdahl, Mikael ; Eriksson, Mats
Author_Institution :
Dept. of Phys. & Meas. Technol., Linkoping Inst. of Technol., Sweden
Volume :
5
Issue :
5
fYear :
2005
Firstpage :
995
Lastpage :
1003
Abstract :
A continuous two-dimensional variation of the properties of the gas sensitive layer of a metal-insulator-semiconductor structure has been analyzed with the scanning light pulse technique. This technique allows a lateral resolution of the local gas response and is, therefore, well suited for analyzing a device where each point of the gas sensitive layer has unique properties. The results show that this method has the potential to optimize the thickness combination of the metal films for a double-layer component to improve important sensor properties such as sensitivity, selectivity, and stability using a drastically reduced number of components.
Keywords :
MIS structures; gas sensors; sensitivity; field-effect gas sensor; gas sensitive layer; metal-insulator-semiconductor structure; scanning light pulse technique; Atomic layer deposition; Biological materials; Chemical lasers; Chemical sensors; Gas detectors; Hydrogen; Insulation; Physics; Research and development; Sensor arrays; Ammonia; chemical sensor; field-effect gas sensor; gas sensing; hydrogen; metal–insulator–semiconductor (MIS); scanning light pulse technique (SLPT);
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2005.845193
Filename :
1504761
Link To Document :
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