Title :
Millimeter-wave permittivity measurement of deposited dielectric films using the spherical open resonator
Author :
Dudorov, S.N. ; Lioubtchenko, D.V. ; Mallat, J.A. ; Raisanen, A.V.
Author_Institution :
MilliLab, Helsinki Univ. of Technol., Finland
Abstract :
A differential method using the spherical open resonator is developed for permittivity measurement of a thin dielectric film on an optically dense substrate. It is based on a measurement of the resonant frequency shift due to the thin film on the substrate. The accuracy of the method is demonstrated to be about 4% for a 5.6-μm photoresist film at 142 GHz.
Keywords :
dielectric thin films; millimetre wave measurement; permittivity measurement; resonators; 142 GHz; 5.6 micron; deposited dielectric film; dielectric constant; differential method; millimeter-wave permittivity measurement; photoresist film; resonant frequency shift; spherical open resonator; thin dielectric film; Dielectric films; Dielectric measurements; Dielectric substrates; Frequency measurement; Millimeter wave measurements; Millimeter wave technology; Optical films; Optical resonators; Permittivity measurement; Resonant frequency; Dielectric constant; millimeter wave; open resonator; thin film;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2005.855370
