Temperature control in a rapid thermal processor

Temperature control problems in a rapid thermal processor (RTP) are addressed by using a conventional proportional-integral-derivative (PID) controller and an autoadaptive algorithm. So far, temperature control in most RTP systems has usually been accomplished by using PID controllers. In RTP systems using only classical control schemes, the setting of the control module is a long and complicated task, which often provides optimum results within a limited temperature range. It is shown that adaptive control is less affected by process dynamics