Title :
SiGe HBT Without Selectively Implanted Collector (SIC) Exhibiting

and

Author :
Rieh, Jae-Sung ; Khater, Marwan ; Freeman, Greg ; Ahlgren, David
Author_Institution :
Sch. of Electr. Eng., Korea Univ., Seoul
Abstract :
Device characteristics for SiGe heterojunction bipolar transistors fabricated by a simplified process without selectively implanted collector (SIC), which exhibit peak fmax of 310 GHz at the collector-current density of 7 mA/mum2 and BVCEO of 2 V, are reported. For comparison, the characteristics of devices with various SIC doses are also presented, and the observed trends are discussed
Keywords :
Ge-Si alloys; electric breakdown; heterojunction bipolar transistors; 2 V; 310 GHz; HBT; SIC doses; SiGe; breakdown voltage; heterojunction bipolar transistors; Doping; Germanium silicon alloys; Heterojunction bipolar transistors; Implants; Millimeter wave technology; Millimeter wave transistors; Silicon carbide; Silicon germanium; Space technology; Voltage; Breakdown voltage (BV); heterojunction bipolar transistors (HBTs);
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2006.879679