• DocumentCode
    1162197
  • Title

    Solid immersion lenses in planar waveguides

  • Author

    Chien, De-Hao ; Tsai, Chang-Heng ; Lo, Shih-Shou ; Chen, Chii-Chang ; Chang, Jenq-Yang

  • Author_Institution
    Inst. of Opt. Sci., Nat. Central Univ., Jhong-Li City, Taiwan
  • Volume
    23
  • Issue
    9
  • fYear
    2005
  • Firstpage
    2746
  • Lastpage
    2748
  • Abstract
    In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.
  • Keywords
    elemental semiconductors; lenses; optical design techniques; optical fabrication; optical planar waveguides; ray tracing; silicon; optical design; optical fabrication; ray tracing; silicon-based planar waveguides; solid immersion lenses; Design optimization; Lenses; Optical design; Optical devices; Optical planar waveguides; Optical waveguide components; Optical waveguides; Planar waveguides; Ray tracing; Solids; Planar waveguides; solid immersion lenses (SILs);
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/JLT.2005.854036
  • Filename
    1506853
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1162197