Title :
Solid immersion lenses in planar waveguides
Author :
Chien, De-Hao ; Tsai, Chang-Heng ; Lo, Shih-Shou ; Chen, Chii-Chang ; Chang, Jenq-Yang
Author_Institution :
Inst. of Opt. Sci., Nat. Central Univ., Jhong-Li City, Taiwan
Abstract :
In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.
Keywords :
elemental semiconductors; lenses; optical design techniques; optical fabrication; optical planar waveguides; ray tracing; silicon; optical design; optical fabrication; ray tracing; silicon-based planar waveguides; solid immersion lenses; Design optimization; Lenses; Optical design; Optical devices; Optical planar waveguides; Optical waveguide components; Optical waveguides; Planar waveguides; Ray tracing; Solids; Planar waveguides; solid immersion lenses (SILs);
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2005.854036
