Title :
Tapered coaxial microwave probe sensor
Author :
Valiente, L.A. ; Gibson, A.A.P. ; Haigh, A.D.
Author_Institution :
Dept. of Electr. Eng. & Electron., Univ. of Manchester Inst. of Sci. & Technol., UK
Abstract :
A tapered coaxial cavity probe sensor is introduced to demonstrate progressive improvements in the spatial resolution of metallisation patterns for scanning microwave microscopy (SMM) applications. Two versions of this design are described and experimental results illustrate the advantages of a reduced end area surrounding the projecting probe.
Keywords :
cavity resonators; metallisation; microwave devices; scanning electron microscopy; metallisation patterns; scanning microwave microscopy; tapered coaxial cavity probe sensor; tapered coaxial microwave probe sensor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20046391
