• DocumentCode
    1163809
  • Title

    Tapered coaxial microwave probe sensor

  • Author

    Valiente, L.A. ; Gibson, A.A.P. ; Haigh, A.D.

  • Author_Institution
    Dept. of Electr. Eng. & Electron., Univ. of Manchester Inst. of Sci. & Technol., UK
  • Volume
    40
  • Issue
    23
  • fYear
    2004
  • Firstpage
    1483
  • Lastpage
    1484
  • Abstract
    A tapered coaxial cavity probe sensor is introduced to demonstrate progressive improvements in the spatial resolution of metallisation patterns for scanning microwave microscopy (SMM) applications. Two versions of this design are described and experimental results illustrate the advantages of a reduced end area surrounding the projecting probe.
  • Keywords
    cavity resonators; metallisation; microwave devices; scanning electron microscopy; metallisation patterns; scanning microwave microscopy; tapered coaxial cavity probe sensor; tapered coaxial microwave probe sensor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20046391
  • Filename
    1358949