DocumentCode
1163809
Title
Tapered coaxial microwave probe sensor
Author
Valiente, L.A. ; Gibson, A.A.P. ; Haigh, A.D.
Author_Institution
Dept. of Electr. Eng. & Electron., Univ. of Manchester Inst. of Sci. & Technol., UK
Volume
40
Issue
23
fYear
2004
Firstpage
1483
Lastpage
1484
Abstract
A tapered coaxial cavity probe sensor is introduced to demonstrate progressive improvements in the spatial resolution of metallisation patterns for scanning microwave microscopy (SMM) applications. Two versions of this design are described and experimental results illustrate the advantages of a reduced end area surrounding the projecting probe.
Keywords
cavity resonators; metallisation; microwave devices; scanning electron microscopy; metallisation patterns; scanning microwave microscopy; tapered coaxial cavity probe sensor; tapered coaxial microwave probe sensor;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20046391
Filename
1358949
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