Title :
Plasma-sprayed thick-film anisotropic magnetoresistive (AMR) sensors
Author :
Gambino, Richard J. ; Raja, Muthuvel Manivel ; Sampath, Sanjay ; Greenlaw, Robert
Author_Institution :
Dept. of Mater. Sci. & Eng., State Univ. of New York, Stony Brook, NY, USA
Abstract :
We report our recent work on thick-film permalloy (NiFe) and NiCo-alloy anisotropic magnetoresistive (AMR) sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo-alloy sensors. Resistivity of thermal-sprayed thick film is 40-60 μΩ cm, which is higher than bulk material. A maximum ΔR/R value of 5.2% is achieved after thermal annealing. A high-ΔR/R value and low-saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.
Keywords :
Permalloy; annealing; cobalt alloys; magnetoresistive devices; plasma arc spraying; sensors; thermal spraying; thick film devices; AMR effect; NiCo; NiFe; anisotropic magnetoresistive sensors; low-saturation fields; permalloy; plasma sprayed sensor; sensor layout; thermal annealing; thermal spray sensors; thick-film sensors; Anisotropic magnetoresistance; Conductivity; Magnetic sensors; Plasmas; Sensor phenomena and characterization; Thermal resistance; Thermal sensors; Thermal spraying; Thick film sensors; Thick films; 65; MR; NiFe and NiCo alloys; plasma spray; sensor; thick-film magnetoresistive;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2004.836866
