Title :
Characterisation and modelling of coplanar transmission lines on SiC substrates
Author :
Royet, A.S. ; Cabon, B. ; Rozeau, O. ; Ouisse, T. ; Billon, T.
Author_Institution :
IMEP, France
Abstract :
The paper investigates the characteristics of microwave transmission in coplanar waveguides (CPWs) fabricated on various silicon carbide substrates. Propagation constant and characteristic impedance measurements were performed at frequencies from 0.1 to 10 GHz. Different propagation modes are observed as a function of frequency and substrate resistivity. In the case of the low-loss structure, a quasi-TEM equivalent circuit model was developed from the available process parameters, taking into account the effects of electromagnetic fields in CPW structures.
Keywords :
coplanar transmission lines; coplanar waveguides; electric impedance measurement; electromagnetic fields; equivalent circuits; microwave measurement; silicon compounds; waveguide theory; 0.1 to 10 GHz; CPW structures; SiC; characteristic impedance measurement; coplanar transmission lines; coplanar waveguides; electromagnetic fields; low-loss structure; microwave measurement setup; microwave transmission; process parameters; propagation constant measurement; quasi-TEM equivalent circuit model; silicon carbide substrates; substrate resistivity;
Journal_Title :
Microwaves, Antennas and Propagation, IEE Proceedings
DOI :
10.1049/ip-map:20020564
