Title :
All-around photolithography
Author :
Gnewuch, H. ; Salvi, J. ; Pannell, C.N.
Author_Institution :
Sch. of Phys. Sci., Kent Univ., Canterbury, UK
fDate :
3/6/2003 12:00:00 AM
Abstract :
A versatile and simple technique for the unrestricted photolithographic patterning of the curved lateral surface of an optical fibre is described, offering a minimal feature size of ∼20 μm.
Keywords :
optical fibre fabrication; photolithography; all-around photolithography; fabrication method; optical fibre;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030326
