Title :
A 2.5-rad/s2 resolution digital output MEMS-based rotational accelerometer for HDD applications
Author :
Gola, A. ; Pasolini, F. ; Chiesa, E. ; Lasalandra, E. ; Tronconi, M. ; Ungaretti, T. ; Baschirotto, A. ; Oboe, R.
Author_Institution :
STMicroelectronics, Cornaredo, Italy
fDate :
3/1/2003 12:00:00 AM
Abstract :
A 2.5-rad/s2 resolution micro-electro-mechanical system-based rotational accelerometer targeted for hard disk drive (HDD) application is presented. The device is composed by a 0.6-μm BiCMOS electronic interface that implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancing as low as 50 aF (50·10-18 F). The produced bitstream is then processed by a digital chain and made available through a standard three-wire digital interface. The device is intended for feedforward compensation of external disturbances acting on computer HDDs to steadily keep the read-write heads on track and to allow greater track densities.
Keywords :
accelerometers; compensation; disc drives; feedforward; hard discs; magnetic heads; microsensors; sigma-delta modulation; 0.6 micron; 50 aF; BiCMOS electronic interface; HDD applications; HDDs; MEMS-based rotational accelerometer; bitstream; capacitive unbalancing; digital output; feedforward compensation; hard disk drive; read-write heads; single bit electromechanical ΣΔ conversion loop; three-wire digital interface; track densities; Accelerometers; BiCMOS integrated circuits; Capacitance measurement; Capacitive sensors; Displacement measurement; Hard disks; Micromechanical devices; Rotation measurement; Sensor systems; Vibration measurement;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2003.808947
