• DocumentCode
    116962
  • Title

    Fabrication of microcuvettes using anodic aluminum oxide membrane

  • Author

    Tzaneva, Boriana R. ; Videkov, Valentin H.

  • Author_Institution
    Tech. Univ. of Sofia, Sofia, Bulgaria
  • fYear
    2014
  • fDate
    2-4 Oct. 2014
  • Firstpage
    105
  • Lastpage
    108
  • Abstract
    A variant for preparing an anodic aluminium oxide (AAO) membrane in copper ring with deposited tin last layer is proposed in the work. It allows to create closed microholders (microcuvettes) with developed nanostructured surface by soldering. Classical techniques as photolithography, electrochemical oxidation and metal deposition, etching and soldering was used. Is it approved by FTIR-analysis, that the prepared by proposed technological scheme cuvettes can be used as closed volumes containing gas and volatile liquids with designation of optical sensors.
  • Keywords
    Fourier transform infrared spectroscopy; aluminium compounds; copper; etching; membranes; micromechanical devices; oxidation; photolithography; AAO membrane; FTIR-analysis; anodic aluminum oxide membrane; closed microholders; copper ring; deposited tin last layer; electrochemical oxidation; etching; metal deposition; microcuvettes fabrication; optical sensors; photolithography; soldering; volatile liquids; Aluminum oxide; Copper; Soldering; Surface morphology; Surface treatment; Tin; Anodic aluminum oxide; FTIR; cuvette; sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electronics Instrument Engineering (APEIE), 2014 12th International Conference on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4799-6019-4
  • Type

    conf

  • DOI
    10.1109/APEIE.2014.7040828
  • Filename
    7040828