DocumentCode
116962
Title
Fabrication of microcuvettes using anodic aluminum oxide membrane
Author
Tzaneva, Boriana R. ; Videkov, Valentin H.
Author_Institution
Tech. Univ. of Sofia, Sofia, Bulgaria
fYear
2014
fDate
2-4 Oct. 2014
Firstpage
105
Lastpage
108
Abstract
A variant for preparing an anodic aluminium oxide (AAO) membrane in copper ring with deposited tin last layer is proposed in the work. It allows to create closed microholders (microcuvettes) with developed nanostructured surface by soldering. Classical techniques as photolithography, electrochemical oxidation and metal deposition, etching and soldering was used. Is it approved by FTIR-analysis, that the prepared by proposed technological scheme cuvettes can be used as closed volumes containing gas and volatile liquids with designation of optical sensors.
Keywords
Fourier transform infrared spectroscopy; aluminium compounds; copper; etching; membranes; micromechanical devices; oxidation; photolithography; AAO membrane; FTIR-analysis; anodic aluminum oxide membrane; closed microholders; copper ring; deposited tin last layer; electrochemical oxidation; etching; metal deposition; microcuvettes fabrication; optical sensors; photolithography; soldering; volatile liquids; Aluminum oxide; Copper; Soldering; Surface morphology; Surface treatment; Tin; Anodic aluminum oxide; FTIR; cuvette; sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electronics Instrument Engineering (APEIE), 2014 12th International Conference on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4799-6019-4
Type
conf
DOI
10.1109/APEIE.2014.7040828
Filename
7040828
Link To Document