DocumentCode
1170348
Title
New electron-probe instruments
Author
Oatley, C.W.
Volume
12
Issue
8
fYear
1966
fDate
8/1/1966 12:00:00 AM
Firstpage
282
Lastpage
285
Abstract
Details of the construction and mode of operation of the scanning electron microscope, the scanning electron diffractometer and the mirror electron microscope have recently been published elsewhere; in this article, the emphasis is on their uses and advantages.
Keywords
electron beams; measurement by electrical methods;
fLanguage
English
Journal_Title
Electronics and Power
Publisher
iet
ISSN
0013-5127
Type
jour
DOI
10.1049/ep.1966.0212
Filename
5177997
Link To Document