DocumentCode
1170748
Title
Electrically efficient production of a diffuse nonthermal atmospheric plasma
Author
Kong, Michael G. ; Tao Deng, Xu
Author_Institution
Dept. of Electron. & Electr. Eng., Loughborough Univ., Leicestershire, UK
Volume
31
Issue
1
fYear
2003
fDate
2/1/2003 12:00:00 AM
Firstpage
7
Lastpage
18
Abstract
Diffuse nonthermal gas discharges generated at atmospheric pressure have found increasing applications in many key materials processing areas such as etching, deposition, and structural modification of polymeric surfaces. To facilitate tailored and improved applications of these novel gas plasmas, we consider their pulsed generation based on one-dimensional numerical simulation of helium-nitrogen discharges. We consider four waveforms of the plasma-generating voltage, namely: 1) sinusoidal; 2) peak-levelled sinusoidal; 3) peak-levelled and tail-trimmed sinusoidal; and 4) pulsed with a Gaussian-shaped tail, all at the same repetition frequency of 10 kHz. For each case, voltage and current characteristics are calculated and then used to assess whether the generated plasma is diffuse and nonthermal. Densities of electrons, ions, and metastables are calculated, together with the dissipated electric power in the plasma bulk. It is found that plasma pulsing can significantly reduce the electric power needed to sustain diffuse nonthermal atmospheric plasmas. Specifically by choosing appropriate pulse shape, the plasma-sustaining power can be reduced by more than 50% without reducing densities of electrons, ions, and metastables. On the other hand, electron density can be enhanced by 68% with the same input electric power if the pulsewidth is suitably narrowed.
Keywords
discharges (electric); plasma density; plasma pressure; plasma production; plasma simulation; 10 kHz; Gaussian-shaped tail; atmospheric pressure nonthermal plasmas; current characteristics; deposition; diffuse nonthermal atmospheric plasma; diffuse nonthermal atmospheric plasmas; diffuse nonthermal gas discharges; diffuse nonthermal plasma; electron densities; etching; gas plasmas; helium-nitrogen discharges; input electric power; ion densities; metastable density; mospheric pressure; nonthermal plasma; one-dimensional numerical simulation; peak-levelled sinusoidal waveforms; plasma modeling; plasma pulsing; plasma-generating voltage; plasma-sustaining power; polymeric surfaces; pulse plasmas; pulsed generation; pulsed waveforms; pulsewidth; sinusoidal waveforms; structural modification; tail-trimmed sinusoidal waveforms; voltage characteristics; Atmospheric-pressure plasmas; Electrons; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma simulation; Plasma waves; Production; Voltage;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2003.808884
Filename
1190963
Link To Document