• DocumentCode
    1170748
  • Title

    Electrically efficient production of a diffuse nonthermal atmospheric plasma

  • Author

    Kong, Michael G. ; Tao Deng, Xu

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Loughborough Univ., Leicestershire, UK
  • Volume
    31
  • Issue
    1
  • fYear
    2003
  • fDate
    2/1/2003 12:00:00 AM
  • Firstpage
    7
  • Lastpage
    18
  • Abstract
    Diffuse nonthermal gas discharges generated at atmospheric pressure have found increasing applications in many key materials processing areas such as etching, deposition, and structural modification of polymeric surfaces. To facilitate tailored and improved applications of these novel gas plasmas, we consider their pulsed generation based on one-dimensional numerical simulation of helium-nitrogen discharges. We consider four waveforms of the plasma-generating voltage, namely: 1) sinusoidal; 2) peak-levelled sinusoidal; 3) peak-levelled and tail-trimmed sinusoidal; and 4) pulsed with a Gaussian-shaped tail, all at the same repetition frequency of 10 kHz. For each case, voltage and current characteristics are calculated and then used to assess whether the generated plasma is diffuse and nonthermal. Densities of electrons, ions, and metastables are calculated, together with the dissipated electric power in the plasma bulk. It is found that plasma pulsing can significantly reduce the electric power needed to sustain diffuse nonthermal atmospheric plasmas. Specifically by choosing appropriate pulse shape, the plasma-sustaining power can be reduced by more than 50% without reducing densities of electrons, ions, and metastables. On the other hand, electron density can be enhanced by 68% with the same input electric power if the pulsewidth is suitably narrowed.
  • Keywords
    discharges (electric); plasma density; plasma pressure; plasma production; plasma simulation; 10 kHz; Gaussian-shaped tail; atmospheric pressure nonthermal plasmas; current characteristics; deposition; diffuse nonthermal atmospheric plasma; diffuse nonthermal atmospheric plasmas; diffuse nonthermal gas discharges; diffuse nonthermal plasma; electron densities; etching; gas plasmas; helium-nitrogen discharges; input electric power; ion densities; metastable density; mospheric pressure; nonthermal plasma; one-dimensional numerical simulation; peak-levelled sinusoidal waveforms; plasma modeling; plasma pulsing; plasma-generating voltage; plasma-sustaining power; polymeric surfaces; pulse plasmas; pulsed generation; pulsed waveforms; pulsewidth; sinusoidal waveforms; structural modification; tail-trimmed sinusoidal waveforms; voltage characteristics; Atmospheric-pressure plasmas; Electrons; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma simulation; Plasma waves; Production; Voltage;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2003.808884
  • Filename
    1190963