Title :
Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
Author :
Yiang, K.Y. ; Yoo, W.J. ; Krishnamoorthy, Ahila
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and leads to the lowering of the overall breakdown strength.
Keywords :
dielectric thin films; electric breakdown; polymers; porous materials; stability; conduction mechanicsm; electrical stability; hydrocarbon polymer; low-k dielectric; porosity effect; Bonding; Chemicals; Conducting materials; Dielectric breakdown; Dielectric materials; Electric breakdown; Hydrocarbons; Polymers; Stability; Thermal degradation; Conduction mechanism; low-; porosity;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2005.856189
