Analysis of Class-E Based RF Power Amplifiers Using Harmonic Modeling

An analysis of the Class-E power amplifier is given using harmonic modeling that facilitates its characterization for a wide load-space regime expected in applications such as RF plasma generation for semiconductor manufacturing. Using a hybrid matrix-framework made up of the dominant harmonics of the circuit variables aided by the time-domain boundary conditions of the power switch voltage waveform, a quasi-linear algorithm is developed to accurately determine the voltage and the current levels expected on all components of the power amplifier for arbitrary loading and operating conditions. The application of the algorithm for design optimization is discussed, and its extension to phase-controlled Class-E power amplifier pairs is described.