Title :
Rapid direct fabrication of active electro-optic modulators in GaAs
Author :
Eldada, Louay ; Zhu, Nongfan ; Ruberto, Mark N. ; Levy, Miguel ; Scarmozzino, Robert ; Osgood, Richard M., Jr.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
fDate :
9/1/1994 12:00:00 AM
Abstract :
We have developed several direct-write laser processing techniques to masklessly fabricate prototypes of waveguiding devices in GaAs/AlGaAs substrates. This flexible technology allows the rapid, successive fabrication and testing of devices such as modulators. Previously, we had reported use of this technology to fabricate low-loss single-mode passive waveguiding structures and devices. In this paper, we report the fabrication of active electro-optic modulators. These devices include an electro-optic polarization modulator, an integrated amplitude modulator consisting of a polarization modulator and an on-chip polarizer, and an integrated Mach-Zehnder interferometer
Keywords :
III-V semiconductors; amplitude modulation; electro-optical devices; gallium arsenide; integrated optics; light interferometers; optical losses; optical modulation; optical polarisers; optical waveguides; optical workshop techniques; GaAs; GaAs-AlGaAs; GaAs/AlGaAs substrates; active electro-optic modulators; direct-write laser processing techniques; electro-optic polarization modulator; flexible technology; integrated Mach-Zehnder interferometer; integrated amplitude modulator; low-loss single-mode passive waveguiding structures; masklessly fabricate; on-chip polarizer; polarization modulator; rapid direct fabrication; successive fabrication; testing; waveguiding devices; Chemical lasers; Circuits; Electrooptic modulators; Etching; Gallium arsenide; Integrated optics; Optical device fabrication; Optical filters; Optical refraction; Optical waveguides;
Journal_Title :
Lightwave Technology, Journal of
