DocumentCode :
1174866
Title :
Laser micromachining aids large-scale integration
Volume :
13
Issue :
9
fYear :
1967
fDate :
9/1/1967 12:00:00 AM
Firstpage :
347
Abstract :
A laser machining technique recently developed at Standard Telecommunication Laboratories should enable a wide variety of circuit functions to be realised very simply in large-scale integrated-circuit form.
fLanguage :
English
Journal_Title :
Electronics and Power
Publisher :
iet
ISSN :
0013-5127
Type :
jour
DOI :
10.1049/ep.1967.0233
Filename :
5178540
Link To Document :
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