Title :
Use of a surface-acoustic-wave (SAW) device to measure gas flow
Author :
Joshi, Shrinivas G.
Author_Institution :
Dept. of Electr., Comput. & Biomed. Eng., Marquette Univ., Milwaukee, WI, USA
fDate :
6/1/1989 12:00:00 AM
Abstract :
The use of a surface-acoustic-wave (SAW) device to measure the rate of gas flow is described. The device is a delay-line stabilized SAW oscillator heated to a suitable temperature above the ambient. Flow of gas carries heat away by convection. This lowers the substrate temperature, thereby causing change in oscillator frequency. The frequency of a 68-MHz oscillator fabricated on Y-Z LiNbO3 substrate increases by more than 160 kHz for variation in flow rate from 0 to 1000 cm3/min
Keywords :
acoustic delay lines; flow measurement; flowmeters; lithium compounds; oscillators; stability; substrates; surface acoustic wave devices; 68 MHz; LiNbO3 substrate; delay-line stabilized SAW oscillator; sensor; Delay lines; Fluid flow; Fluid flow measurement; Frequency; Optical surface waves; Oscillators; Surface acoustic wave devices; Surface acoustic waves; Surface resistance; Temperature sensors;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
