DocumentCode :
1175902
Title :
Micromachined inverted F antenna for integration on low resistivity silicon substrates
Author :
Öjefors, Erik ; Grenier, Katia ; Mazenq, Laurent ; Bouchriha, Fouad ; Rydberg, Anders ; Plana, Robert
Author_Institution :
Dept. of Eng. Sci., Uppsala Univ., Sweden
Volume :
15
Issue :
10
fYear :
2005
Firstpage :
627
Lastpage :
629
Abstract :
This letter addresses the integration of a 24-GHz inverted-F antenna on a low resistivity silicon substrate, using micromachining post-processing techniques compatible with commercial Si/SiGe active device processes. By suspending the radiator on a 2.4mm2 large polymer membrane an on-chip antenna with -0.7 dBi gain has been realized.
Keywords :
elemental semiconductors; micromachining; microwave antennas; silicon; 24 GHz; inverted F antennas; low resistivity silicon substrates; micromachining; microwave antennas; Biomembranes; Conductivity; Dielectric losses; Dielectric substrates; Frequency; Germanium silicon alloys; Micromachining; Mobile antennas; Radar antennas; Silicon germanium; Antennas; micromachining; silicon;
fLanguage :
English
Journal_Title :
Microwave and Wireless Components Letters, IEEE
Publisher :
ieee
ISSN :
1531-1309
Type :
jour
DOI :
10.1109/LMWC.2005.856693
Filename :
1512202
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1175902
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