Title :
Temperature variation of actuation voltage in capacitive MEMS switches
Author :
Goldsmith, Charles L. ; Forehand, David I.
Author_Institution :
MEMtronics Corp., Plano, TX, USA
Abstract :
A simple theoretical model for temperature variation of actuation voltage for fixed-fixed beam switches is developed and applied to model capacitive radio frequency microelectromechanical systems switches. Measured data from these switches fit very well with the model over a 120°C operating temperature range, demonstrating an average 0.127V/°C to 0.132V/°C with less than 8% deviation between measured and modeled results. The proposed model provides valuable insight into the factors impacting variability of actuation voltage over broad temperature ranges.
Keywords :
microswitches; microwave switches; 120 C; MEMS switch; actuation voltage; capacitive switch; fixed-fixed beam switch; radio frequency microelectromechanical systems; temperature variation; Biomembranes; Electrodes; Micromechanical devices; Microswitches; Radiofrequency microelectromechanical systems; Residual stresses; Springs; Switches; Temperature distribution; Voltage; Actuation; capacitive switch; electrostatic; radio frequency microelectromechanical systems (RF MEMS); temperature;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2005.856827
