DocumentCode
1176270
Title
Better reliability with new m.o.s. process
Volume
16
Issue
2
fYear
1970
fDate
2/1/1970 12:00:00 AM
Firstpage
54
Abstract
A new process for the production of integrated circuits is expected to lead to better device yields and improved reliability of finished devices, particularly for m.o.s. components.
fLanguage
English
Journal_Title
Electronics and Power
Publisher
iet
ISSN
0013-5127
Type
jour
DOI
10.1049/ep.1970.0047
Filename
5179293
Link To Document