DocumentCode
1176725
Title
Limit cycle oscillations in CW laser-driven NEMS
Author
Aubin, Keith ; Zalalutdinov, Maxim ; Alan, Tuncay ; Reichenbach, Robert B. ; Rand, Richard ; Zehnder, Alan ; Parpia, Jeevak ; Craighead, Harold
Author_Institution
Cornell Center for Mater. Res., Ithaca, NY, USA
Volume
13
Issue
6
fYear
2004
Firstpage
1018
Lastpage
1026
Abstract
Limit cycle, or self-oscillations, can occur in a variety of NEMS devices illuminated within an interference field. As the device moves within the field, the quantity of light absorbed and hence the resulting thermal stresses changes, resulting in a feedback loop that can lead to limit cycle oscillations. Examples of devices that exhibit such behavior are discussed as are experimental results demonstrating the onset of limit cycle oscillations as continuous wave (CW) laser power is increased. A model describing the motion and heating of the devices is derived and analyzed. Conditions for the onset of limit cycle oscillations are computed as are conditions for these oscillations to be either hysteretic or nonhysteretic. An example simulation of a particular device is discussed and compared with experimental results.
Keywords
driver circuits; finite element analysis; limit cycles; micromechanical devices; nanoelectronics; thermal stresses; CW laser-driven NEMS; continuous wave laser power; feedback loop; finite element method; interference field; laser drive; limit cycle oscillations; self-oscillation; thermal stress; Feedback loop; Heating; Interference; Laser feedback; Laser modes; Limit-cycles; Motion analysis; Nanoelectromechanical systems; Power lasers; Thermal stresses; 65; FEM; Finite element method; laser drive; limit cycle oscillation; self-oscillation; thermal stress;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2004.838360
Filename
1364061
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