• DocumentCode
    1176725
  • Title

    Limit cycle oscillations in CW laser-driven NEMS

  • Author

    Aubin, Keith ; Zalalutdinov, Maxim ; Alan, Tuncay ; Reichenbach, Robert B. ; Rand, Richard ; Zehnder, Alan ; Parpia, Jeevak ; Craighead, Harold

  • Author_Institution
    Cornell Center for Mater. Res., Ithaca, NY, USA
  • Volume
    13
  • Issue
    6
  • fYear
    2004
  • Firstpage
    1018
  • Lastpage
    1026
  • Abstract
    Limit cycle, or self-oscillations, can occur in a variety of NEMS devices illuminated within an interference field. As the device moves within the field, the quantity of light absorbed and hence the resulting thermal stresses changes, resulting in a feedback loop that can lead to limit cycle oscillations. Examples of devices that exhibit such behavior are discussed as are experimental results demonstrating the onset of limit cycle oscillations as continuous wave (CW) laser power is increased. A model describing the motion and heating of the devices is derived and analyzed. Conditions for the onset of limit cycle oscillations are computed as are conditions for these oscillations to be either hysteretic or nonhysteretic. An example simulation of a particular device is discussed and compared with experimental results.
  • Keywords
    driver circuits; finite element analysis; limit cycles; micromechanical devices; nanoelectronics; thermal stresses; CW laser-driven NEMS; continuous wave laser power; feedback loop; finite element method; interference field; laser drive; limit cycle oscillations; self-oscillation; thermal stress; Feedback loop; Heating; Interference; Laser feedback; Laser modes; Limit-cycles; Motion analysis; Nanoelectromechanical systems; Power lasers; Thermal stresses; 65; FEM; Finite element method; laser drive; limit cycle oscillation; self-oscillation; thermal stress;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2004.838360
  • Filename
    1364061