Title :
A Si-based tunable narrow-band flat-top filter with multiple-step-type Fabry-Perot cavity structure
Author :
Zuo, Y.H. ; Mao, R.W. ; Zheng, Y.Y. ; Shi, X. ; Zhao, L. ; Shi, W.H. ; Cheng, B.W. ; Yu, J.Z. ; Wang, Q.M.
Author_Institution :
State Key Lab. on Integrated Optoelectronics, Chinese Acad. of Sci., Beijing, China
Abstract :
In the optical network, the quick and accurate alignment with wavelength is an important issue during the channel detection. At this point, a filter having flat-top response characteristic is an effective solution. Based on multiple-step-type Fabry-Perot cavity structure, a novel all-Si-based thermooptical tunable flat-top filter with narrow-band has been fabricated, using our patent silicon-on-reflector bonding technology. The device demonstrated a 1-dB flat-top width of 1 nm, 3-dB band of 3 nm, free spectra range of 8 nm, and the tuning range of 4.6 nm was obtained under the applied voltage of 4 V.
Keywords :
Fabry-Perot resonators; bonding processes; elemental semiconductors; optical fabrication; optical filters; optical tuning; silicon; thermo-optical devices; 4 V; Si; Si-based tunable narrow-band flat-top filter; channel detection; multiple-step-type Fabry-Perot cavity structure; silicon-on-reflector bonding; thermooptical filter; Arrayed waveguide gratings; Band pass filters; Fiber gratings; Narrowband; Optical device fabrication; Optical fiber networks; Optical filters; Optical waveguides; Passband; Wafer bonding; Fabry–PÉrot; flat-top filter; step-type; thermal-optical effect;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.854421
