Capacitances of a planar multiconductor configuration on a dielectric substrate by a mixed order finite-element method

A mixed order finite-element technique is utilized, to solve - Rectangular the Integral equations governing the charge density distribution in a planar Fin~ite-_Eulment multiconductor configuration on a dielectric sheet. The capacitive lumped equivalent model for such a circuit is determined. The four-dimensional integrals with singular integrands, resulting from the formulation, are evaluated symbolically. The method is implemented in a package called PARCAP, and is shown to be competitive with the other programs available at this time. Thin film Interdigitated capacitors were measured to lend support to the accuracy and usefulness of PARCAP in circuit design.